Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator

@article{citeulike:699273, abstract = {The temperature dependence (15\&\#150;320\ \ K) of the acoustic dissipation was studied for some lower vibrational modes of a suspended silicon plate 1.5\ \ \µm thick. Our oscillator was exposed to the laboratory environment prior to measurement, laser annealed while in a cryogenic vacuum, and remeasured. We find a dissipation peak at 160\ \ K, similar to results by others, and a second dissipation peak near 30\ \ K. Annealing reduced the dissipation at 160\ \ K by as much as a factor of 10, and gave quality factors as high as 1.4\×106 at 470\ \ kHz and our lowest temperature. Our data support the idea that the 160\ \ K peak is related to adsorbates, and show this mechanism is important at room temperature. Post-anneal room-temperature dissipation appears to be limited by thermoelastic loss for certain modes.}, author = {Haucke, Hans and Liu, Xiao and Vignola, J. F. and Houston, B. H. and Marcus, M. H. and Baldwin, J. W. }, citeulike-article-id = {699273}, doi = {10.1063/1.1921354}, journal = {Applied Physics Letters}, keywords = {damping, plates, thermoelasticity}, number = {18}, posted-at = {2006-06-17 16:00:54}, priority = {3}, publisher = {AIP}, title = {Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator}, url = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal\&id=APPLAB000086000018181903000001\&idtype=cvips\&gifs=yes}, volume = {86}, year = {2005} }

TY - JOUR ID - citeulike:699273 TI - Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator JF - Applied Physics Letters VL - 86 IS - 18 PB - AIP N2 - The temperature dependence (15–320  K) of the acoustic dissipation was studied for some lower vibrational modes of a suspended silicon plate 1.5  µm thick. Our oscillator was exposed to the laboratory environment prior to measurement, laser annealed while in a cryogenic vacuum, and remeasured. We find a dissipation peak at 160  K, similar to results by others, and a second dissipation peak near 30  K. Annealing reduced the dissipation at 160  K by as much as a factor of 10, and gave quality factors as high as 1.4×106 at 470  kHz and our lowest temperature. Our data support the idea that the 160  K peak is related to adsorbates, and show this mechanism is important at room temperature. Post-anneal room-temperature dissipation appears to be limited by thermoelastic loss for certain modes. KW - damping KW - plates KW - thermoelasticity AU - Haucke, Hans AU - Liu, Xiao AU - Vignola, JF AU - Houston, BH AU - Marcus, MH AU - Baldwin, JW PY - 2005/// UR - http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000086000018181903000001&idtype=cvips&gifs=yes ER -