registrieren | anmelden | FAQ      [?] 
Recent | Unread | Search | Authors | Tags | Export

kristgys mems [39 articles]

Neue Publikationen in kristgys Bibliothek eingetragen unter dem Bezeichner: mems. You can also see everyone's mems.
  • Microfluidics meets MEMS
    Proceedings of the IEEE, Vol. 91, No. 6. (2003), pp. 930-953.
    by E Verpoorte, NF De Rooij
    posted to review microfluidics mems by kristgy on 2008-09-09 15:54:26 as ** along with 1 group microfluidics
  • Proposition of Atomic Force Probes Based on Silicon Ring-Resonators
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International (2007), pp. 1529-1532.
    by M Faucher, B Walter, AS Rollier, K Seguini, B Legrand, G Couturier, JP Aime, C Bernard, R Boisgard, L Buchaillot
    posted to afm hardcopy mechanical mems ring_resonator silicon by kristgy on 2008-07-09 12:50:25 as read
  • Intermodulation atomic force microscopy
    Applied Physics Letters, Vol. 92, No. 15. (2008)
    by Daniel Platz, Erik A Tholén, Devrim Pesen, David B Haviland
    posted to afm experiment kth_papers mems non_linear resonant_sensor sensor by kristgy on 2008-04-16 13:01:16 as read along with 2 people hearoplane wmppaul
  • Fundamental limits to force detection using quartz tuning forks
    Review of Scientific Instruments, Vol. 71, No. 7. (2000), pp. 2776-2780.
    by Robert D Grober, Jason Acimovic, Jim Schuck, Dan Hessman, Peter J Kindlemann, Joao Hespanha, Stephen A Morse, Khaled Karrai, Ingo Tiemann, Stephan Manus
    posted to experiment mems quartz resonant_sensor theory by kristgy on 2008-04-16 12:49:05 as **
  • A low-temperature wafer bonding technique using patternable materials
    Journal of Micromechanics and Microengineering, Vol. 12, No. 5. (2002), pp. 611-615.
    by CT Pan, H Yang, SC Shen, MC Chou, HP Chou
    posted to adhesive_bonding experiment mems processing su-8 by kristgy on 2008-03-25 12:52:48 as **
  • A review of MEMS external-cavity tunable lasers
    Journal of Micromechanics and Microengineering, Vol. 17, No. 1. (January 2007), pp. R1-R13.
    by Liu, , Zhang,
    posted to laser mems review tunable by kristgy on 2008-03-20 16:50:48 as ****
  • Silicon in mechanical sensors
    Journal of Physics E: Scientific Instruments, Vol. 21, No. 12. (1988), pp. 1114-1128.
    by JC Greenwood
    posted to mems review sensor silicon thermo_mechanic by kristgy on 2008-01-14 14:31:37 as **
  • Fabrication of single-crystal diamond microcomponents
    Applied Physics Letters, Vol. 65, No. 24. (1994), pp. 3072-3074.
    by John D Hunn, SP Withrow, CW White, RE Clausing, L Heatherly, Paul C Christensen
    posted to diamond laser mems processing by kristgy on 2007-10-11 23:09:58 as **
  • Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler
    Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 13, No. 2. (2007), pp. 202-208.
    by J Yao, D Leuenberger, Lee, MC Wu
    posted to hardcopy mems ring_resonator silicon silicon_oxide tunable by kristgy on 2007-06-22 17:56:48 as ****
  • Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection
    Microelectromechanical Systems, Journal of, Vol. 15, No. 6. (2006), pp. 1466-1476.
    by TP Burg, AR Mirza, N Milovic, CH Tsau, GA Popescu, JS Foster, SR Manalis
    posted to biosensor mems microfluidics by kristgy on 2007-03-02 15:10:46 as ** along with 1 person and 1 group cdppublications CDP
  • Wavelength tunable thermo-optic filter using buckling effect of etalon composed poly-Si/SiO2 multi-layers
    Optical Materials, Vol. 27, No. 5. (February 2005), pp. 787-791.
    by Hun-Yong Park, Chong-Hun Park, Byung-Chul Hwang, Seung G Lee, Beom-Hoan, El-Hang Lee, Doo-Sun Choi, Se-Geun Park
    posted to cavity_resonator experiment hardcopy mems optics refractive_index silicon silicon_oxide thermal_actuator thermo_optic tunable by kristgy on 2006-11-19 20:42:06 as **
  • An all-dielectric tunable optical filter based on the thermo-optic effect
    Journal of Optics A: Pure and Applied Optics, Vol. 6, No. 6. (2004), pp. 504-511.
    by Dennis Hohlfeld, Hans Zappe
    posted to cavity_resonator experiment fiber_optics mems optics refractive_index silicon silicon_nitride silicon_oxide thermal_actuator thermo_optic tunable by kristgy on 2006-11-19 20:29:28 as ** along with 1 person champak
  • Surface micromachining for microelectromechanical systems
    Proceedings of the IEEE, Vol. 86, No. 8. (1998), pp. 1552-1574.
    by JM Bustillo, RT Howe, RS Muller
    posted to mems review by kristgy on 2006-11-10 16:07:51 as **
  • Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch
    Microelectromechanical Systems, Journal of, Vol. 13, No. 3. (2004), pp. 421-428.
    by J Oberhammer, G Stemme
    posted to kth_papers mems mst_papers by kristgy on 2006-11-08 13:23:32 as *
  • Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
    Vol. 23, No. 6. (2005), pp. 2944-2949.
    by B Bilenberg, M Hansen, D Johansen, V Ozkapici, C Jeppesen, P Szabo, IM Obieta, O Arroyo, JO Tegenfeldt, A Kristensen
    posted to biosensor imprint mems microfluidics polymeric processing by kristgy on 2006-09-07 09:55:53 as **
  • Adhesive wafer bonding
    Journal of Applied Physics, Vol. 99, No. 3. (2006)
    by F Niklaus, G Stemme, JQ Lu, RJ Gutmann
    posted to adhesive_bonding bcb hardcopy kth_papers mems mst_papers polymeric processing by kristgy on 2006-09-07 09:21:54 as ****
  • SU-8: a low-cost negative resist for MEMS
    Journal of Micromechanics and Microengineering, Vol. 7, No. 3. (1997), pp. 121-124.
    by H Lorenz, M Despont, N Fahrni, N Labianca, P Renaud, P Vettiger
    posted to 100_citations lithography mems su-8 by kristgy on 2006-09-04 13:30:48 as **
  • Chemical Amplification Resists for Microlithography
    Vol. 172 (2005), pp. 37-245.
    by Hiroshi Ito
    posted to lithography mems processing su-8 by kristgy on 2006-08-24 16:26:32 as **
  • Simple negative resist for deep ultraviolet, electron beam, and x-ray lithography
    International symposium on electron, ion, and photon beams, Vol. 7, No. 6. (1989), pp. 1734-1739.
    by KJ Stewart, M Hatzakis, JM Shaw, DE Seeger, E Neumann
    posted to hardcopy lithography mems processing su-8 by kristgy on 2006-08-24 14:27:29 as **
  • Micromachining applications of a high resolution ultrathick photoresist
    The 38th International symposium on electron, ion, and photon beams, Vol. 13, No. 6. (1995), pp. 3012-3016.
    by KY Lee, N Labianca, SA Rishton, S Zolgharnain, JD Gelorme, J Shaw, THP Chang
    posted to 100_citations lithography mems su-8 by kristgy on 2006-06-12 15:41:21 as **
  • The VAMP -- a new device for handling liquids or gases
    Sensors and Actuators A: Physical, Vol. 57, No. 2. (November 1996), pp. 153-157.
    by M Stehr, S Messner, H Sandmaier, R Zengerle
    posted to mems microfluidics by kristgy on 2006-05-11 09:40:33 as read
  • Monolithic MEMS quadrupole mass spectrometers by deep silicon etching
    Microelectromechanical Systems, Journal of, Vol. 14, No. 5. (2005), pp. 1156-1166.
    by M Geear, RRA Syms, S Wright, AS Holmes
    posted to mass_spectrometry mems by kristgy on 2006-05-08 18:27:21 as **
  • MOEMS modeling for opto-­electro-­mechanical co­-simulation
    Journal of Modeling and Simulation of Microsystems, Vol. 1, No. 1. (1999), pp. 39-48.
    by G Jacquemod, K Vuorinen, F Gaffiot, A Spisser, C Seassal, J­l, P Rojo­romeo, P Vik­torovitch
    posted to mems resonant_sensor by kristgy on 2006-04-09 19:11:00 as *
  • Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
    (13 March 2002)
    by Marc J Madou
    posted to mems processing by kristgy on 2006-04-09 19:05:41 as **
  • HF ETCHING OF SI-OXIDES AND SI-NITRIDES FOR SURFACE MICROMACHINING
    by Du B Bois, G Vereecke, A Witvrouw, De P Moor, Van C Hoof, De A Caussemaeker, A Verbist
    posted to mems processing sabio silicon_nitride silicon_oxide by kristgy on 2006-04-05 09:56:38 as read
  • Etch rates for micromachining processing-Part II
    Microelectromechanical Systems, Journal of, Vol. 12, No. 6. (2003), pp. 761-778.
    by KR Williams, K Gupta, M Wasilik
    posted to etch_rates mems processing by kristgy on 2006-03-24 16:25:09 as **
  • Etch rates for micromachining processing
    Microelectromechanical Systems, Journal of, Vol. 5, No. 4. (1996), pp. 256-269.
    by KR Williams, RS Muller
    posted to etch_rates mems processing by kristgy on 2006-03-24 16:24:02 as ** along with 2 people aloks msterner
  • Thermally excited silicon microactuators
    Electron Devices, IEEE Transactions on, Vol. 35, No. 6. (1988), pp. 758-763.
    by W Riethmuller, W Benecke
    posted to mems thermal_actuator by kristgy on 2006-03-20 14:55:18 as read
  • Modeling of two-hot-arm horizontal thermal actuator
    Journal of Micromechanics and Microengineering, Vol. 13, No. 2. (2003), pp. 312-322.
    by Dong Yan, Amir Khajepour, Raafat Mansour
    posted to mems thermal_actuator by kristgy on 2006-03-20 12:38:46 as ***
  • Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer
    Microelectromechanical Systems, Journal of, Vol. 12, No. 3. (2003), pp. 296-301.
    by P Griss, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:49:48 as *
  • Micromachined electrodes for biopotential measurements
    Microelectromechanical Systems, Journal of, Vol. 10, No. 1. (2001), pp. 10-16.
    by P Griss, P Enoksson, HK Tolvanen-Laakso, P Merilainen, S Ollmar, G Stemme
    posted to medical_mems mems mst_papers by kristgy on 2006-01-15 22:48:55 as *
  • A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure
    Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 200-206.
    by W van der Wijngaart, A Thorsen, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:47:38 as *
  • BCB contact printing for patterned adhesive full-wafer bonded 0-level packages
    Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 419-425.
    by J Oberhammer, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:46:33 as *
  • Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements
    Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 254-260.
    by S Haasl, D Mucha, V Chernoray, T Ebefors, P Enoksson, L Lofdahl, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:46:04 as *
  • A new silicon gas-flow sensor based on lift force
    Microelectromechanical Systems, Journal of, Vol. 7, No. 3. (1998), pp. 303-308.
    by N Svedin, E Kalvesten, E Stemme, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:45:18 as *
  • A silicon resonant sensor structure for Coriolis mass-flow measurements
    Microelectromechanical Systems, Journal of, Vol. 6, No. 2. (1997), pp. 119-125.
    by P Enoksson, G Stemme, E Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:44:43 as *
  • A static turbine flow meter with a micromachined silicon torque sensor
    Microelectromechanical Systems, Journal of, Vol. 12, No. 6. (2003), pp. 937-946.
    by N Svedin, E Stemme, G Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:44:04 as *
  • Micromachined flat-walled valveless diffuser pumps
    Microelectromechanical Systems, Journal of, Vol. 6, No. 2. (1997), pp. 161-166.
    by A Olsson, P Enoksson, G Stemme, E Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:43:10 as *
  • Vibration modes of a resonant silicon tube density sensor
    Microelectromechanical Systems, Journal of, Vol. 5, No. 1. (1996), pp. 39-44.
    by P Enoksson, G Stemme, E Stemme
    posted to mems mst_papers by kristgy on 2006-01-15 22:41:46 as *
    • Bemerkung: Sie können diese Seite wie folgt zitieren: http://www.citeulike.org/user/kristgy/tag/mems

    RIS BibTeX
    CiteULike organises scholarly (or academic) papers or literature and provides bibliographic (which means it makes bibliographies) for universities and higher education establishments. It helps undergraduates and postgraduates. People studying for PhDs or in postdoctoral (postdoc) positions. The service is similar in scope to EndNote or RefWorks or any other reference manager like BibTeX, but it is a social bookmarking service for scientists and humanities researchers.