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1000_citations 100_citations 10_citations 250_citations 25_citations 500_citations 50_citations absorption adhesive_bonding afm antibody antireflection athermal atmosspheric_plasma author_guidelines bcb biacore bioinformatics biosensor biotas biotin bpsg bsa bsg cavity_resonator cell chromium citing_me cmp conducting_polymer cytop density deposition diamond diborane difference_interferometer diffusion discharge_layer disk_resonator dispersion dna dye edge_coupling electrochemistry electrodynamics electron_beam electronics electro_optic electrophoresis electrowetting ellipsometry energy erbium errata erroneous etch-back etching etch_rates etch-stop ethanol experiment experiments fabrication failure_analysis farfield fiber_optics fim first_paper fluid_dynamics fluorescence frequency_comb gallium_arsenide gallium_nitride genetics germanium germanosilicate gold grating_coupler gyroscope handbook hardcopy hipims hydrogen imaging imprint indium_phosphide indium_tin_oxide information infrared kerr_effect kinetics kthb kth_papers lab-on-a-chip lab-on-chip laser light_emission linkage_analysis liquid_core liquid_crystal lithography lpcvd mach-zehnder magnetron mass mass_spectrometry mathematics medical_mems mems metal microfluidics microlens modulator molecular_simulation mst_papers nabiose nanoimprint nanoparticles native_oxide nitrobenzene non_linear not_online optical_trapping optics organization oscillator own_paper ozone patent pdms pecvd phodye phodye_group_papers phosphine photodiode photomixing photonic_crystal photonics physics planar_inductor pmma polarization polycarbonate polymeric polysilazane poly-silicon porous processing protein psg quartz raith raman rate_constant reflow refractive_index replication resistivity resonant_sensor review rhodamine ring_resonator sabio sabio_group_papers science sem sensor sidewall_roughness sidewall_transfer silane silicon silicon_nitride silicon_oxide silicon_oxynitride simulation size slot_waveguide solitary_waves spectroscopy spin_on_glass splitting sputtering statistics stm stress su-8 surface_functionalization surface_plasmon_resonance tantalum_oxide tem teos terahertz test theory thermal_actuator thermal_conductivity thermal_nitridation thermal_oxidation thermo_mechanic thermo_optic titanium_oxide tunable under_etch visible water waveguide wetting young

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