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Microsystem Technologies

Articles from the last few issues of Microsystem Technologies © Springer
  • Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST07, Besancon, France, 79 June 2007
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1215-1216.
    by Khan Malek, Chantal, Saile, Volker, Michel, Bernd
  • Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1217-1222.
    by Hung, Kuo-Yung, Liang, Te-Hsien
  • Fabricating HARMS by using megasonic assisted electroforming
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1223-1226.
    by Liu, Gang, Huang, Xinlong, Xiong, Ying, Tian, Yangchao
  • Statistical process and measurement control for micro production
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1227-1232.
    by Lanza, , Fleischer, , Schlipf,
  • High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1233-1243.
    by Yang, Ren, Mullen, Chuck, Schaline, Mark, Reithmaier, Karl, Sheets, Ron
  • Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1245-1249.
    by Wang, Jun, Liu, Gang, Xiong, Ying, Huang, Xinlong, Guo, Yuhua, Tian, Yangchao
  • Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1251-1255.
    by Liu, Longhua, Liu, Gang, Xiong, Ying, Chen, Jie, Kang, Chunlei, Huang, Xinlong, Tian, Yangchao
  • Applications of thick Sacrificial-Layer of zinc in LIGA process
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1257-1261.
    by Huang, Xinlong, Liu, Gang, Ying, Xiong, Wang, Jun, Guo, Yuhua, Kang, Chunlei, Tian, Yangchao
  • Fast patterning microstructures using inkjet printing conformal masks
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1263-1267.
    by Lin, -H, Yang, , Chang, -Y, Chang, -H, Yen, -T
  • On the simulation of molded micro components and systems
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1269-1277.
    by Albers, Albert, Enkler, Hans-Georg, Leslabay, Pablo
  • The anomalous behavior and properties of NiCo films codeposited in the sulfamate-chloride electrolyte
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1279-1284.
    by Chung, , Zhou, , Chang,
  • Microlens array fabrication by backside exposure using Fraunhofer diffraction
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1285-1290.
    by Song, In-Hyouk, Kang, Kyung-Nam, Jin, Yoonyoung, Park, Daniel, Ajmera, Pratul
  • Lithography with UV-LED array for curved surface structure
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1291-1297.
    by Suzuki, , Matsumoto,
  • Reflectivity test of X-ray mirrors for deep X-ray lithography
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1299-1303.
    by Nazmov, , Reznikova, , Last, , Boerner, , Mohr,
  • Fabrication of micro sloping structures of SU-8 by substrate penetration lithography
    Microsystem Technologies
    by J Onishi, K Makabe, Y Matsumoto
  • Fabrication of large area diffraction grating using LIGA process
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1311-1315.
    by Noda, Daiji, Tanaka, Makoto, Shimada, Kazuma, Yashiro, Wataru, Momose, Atsushi, Hattori, Tadashi
  • Effect of baffle height and Reynolds number on fluid mixing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1317-1323.
    by Chung, , Wu, -Y, Shih,
  • Effect of applying ultrasonic vibration in thermal nanoimprint lithography
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1325-1333.
    by Mekaru, Harutaka, Noguchi, Toshihiko, Goto, Hiroshi, Takahashi, Masaharu
  • A Si stencil mask for deep X-ray lithography fabricated by MEMS technology
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1335-1342.
    by Mekaru, Harutaka, Takano, Takayuki, Ukita, Yoshiaki, Utsumi, Yuichi, Takahashi, Masaharu
  • Proton beam writing: a platform technology for nanowire production
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1343-1348.
    by Kan, , Zhang, , Chiam, , Osipowicz, , Bettiol, , Watt,
  • High-aspect-ratio through-hole array microfabricated in a PMMA plate for monodisperse emulsion production
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1349-1357.
    by Kobayashi, Isao, Hirose, Sayumi, Katoh, Takanori, Zhang, Yanping, Uemura, Kunihiko, Nakajima, Mitsutoshi
  • Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1359-1365.
    by Shibata, Takayuki, Takahashi, Yoichi, Kawashima, Takahiro, Kubota, Toshio, Mita, Mamoru, Mineta, Takashi, Makino, Eiji
  • Process parameter analysis in ablating micro-mold manufacturing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1367-1372.
    by Fleischer, , Halvadjiysky, , Haupt,
  • Cylindrical coils created with 3D X-ray lithography and metallization
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1373-1379.
    by Matsumoto, Yoshifumi, Setomoto, Masaru, Noda, Daiji, Hattori, Tadashi
  • Resin micromachining by roller hot embossing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1381-1388.
    by Ishizawa, Naoya, Idei, Kazuyoshi, Kimura, Taro, Noda, Daiji, Hattori, Tadashi
  • Effect of cobalt content on the work function of the electrodeposited nickelcobalt films
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1389-1394.
    by Chung, , Chang, , Zhou,
  • Fabrication of the cyclical fluid channel using the surface acoustic wave actuator and continuous fluid pumping in the cyclical fluid channel
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1395-1398.
    by Fukuoka, Daisuke, Utsumi,
  • High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structure
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1399-1403.
    by Utsumi, Yuichi, Asano, Toshifumi, Ukita, Yoshiaki, Matsui, Katsuhiro, Takeo, Masahiro, Negoro, Seiji
  • Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1405-1409.
    by Shan, Xuechuan, Maw, , Tjeung, , Ling, , Lu, , Jachowicz,
  • High efficiency mixing by the use of cross-linked micro capillary fluid filter
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1411-1416.
    by Fujiwara, , Ukita, , Takeo, , Negoro, , Kanie, , Katayama, , Utsumi,
  • Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1417-1422.
    by Kishihara, Mitsuyoshi, Ukita, Yoshiaki, Utsumi, Yuichi, Ohta, Isao
  • Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1423-1428.
    by Chatzichristidi, , Rajta, , Speliotis, Th, Valamontes, , Goustouridis, , Argitis, , Raptis,
  • Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1429-1438.
    by Park, Daniel, Jeong, Youngkyun, Lee, Jeong-Bong, Jung, Sungyong
  • Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1439-1446.
    by Sim, Hyung, Lee, Seong, Kang, Kwan
  • A new UV sensitive positive resist for X-ray masks manufacture
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1447-1450.
    by Voigt, Anja, Heinrich, Marina, Gruetzner, Gabi, Kouba, Josef, Scheunemann, -U, Rudolph,
  • High functionality of a polymer nanocomposite material for MEMS applications
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1451-1459.
    by Dawan, Fareed, Jin, Yoonyoung, Goettert, Jost, Ibekwe, Samuel
  • Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1461-1466.
    by Utsumi, Yuichi, Ikeda, Tomohiro, Minamitani, Megumi, Suwa, Kazuo
  • Enhancement of the adhesive force of metal films on PTFE surface achieved by fast-atom-beam surface modification
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1467-1473.
    by Utsumi, Yuichi, Kishimoto, Takefumi
  • Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1475-1480.
    by Baron, , Passave, , Guichardaz, , Cabodevila,
  • Validation of micromechanical systems
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1481-1485.
    by Albers, Albert, Burkardt, Norbert, Deigendesch, Tobias, Ellmer, Claudia, Hauser, Stefan
  • Commercialising HARMST-LIGA technologies
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1487-1489.
    by Tolfree, David
  • Why you will use the deep X-ray LIG(A) technology to produce MEMS?
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1491-1497.
    by Meyer, Pascal, Schulz, Joachim, Hahn, Lothar, Saile, Volker
  • Using bulk micromachined structures to enhance pool boiling heat transfer
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1499-1505.
    by Zhang, Min, Lian, Kun
  • Micro injection molding for mass production using LIGA mold inserts
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1507-1514.
    by Katoh, Takanori, Tokuno, Ryuichi, Zhang, Yanping, Abe, Masahiro, Akita, Katsumi, Akamatsu, Masaharu
  • Stress engineering and mechanical properties of SU-8-layers for mechanical applications
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1515-1523.
    by Hammacher, , Fuelle, , Flaemig, , Saupe, , Loechel, , Grimm,
  • Manufacturing of microstructures with high aspect ratio by micromachining
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1525-1529.
    by Gietzelt, , Eichhorn, , Schubert,
  • Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications
    Microsystem Technologies
    by M Haj-Taieb, A Haseeb, J Caulfield, K Bade, J Aktaa, K Hemker
  • Ni electroplating on a resist micro-machined by proton beam writing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1537-1540.
    by Uchiya, Naoyuki, Furuta, Yusuke, Nishikawa, Hiroyuki, Watanabe, Tohru, Haga, Junji, Satoh, Takahiro, Oikawa, Masakazu, Ishii, Yasuyuki, Kamiya, Tomihiro
  • High aspect ratio glass structures produced by means of the drawing technology
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1541-1544.
    by Hesse, , Mrotzek, , Hulsenberg, , Radlein,
  • Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing
    Microsystem Technologies, Vol. 14, No. 9-11. (October 2008), pp. 1545-1551.
    by Sahli, , Roques-Carmes, , Khan Malek, , Gelin,
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