Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST07, Besancon, France, 79 June 2007

@article{citeulike:3149115, author = {Malek, Khan and Chantal and Saile and Volker and Michel and Bernd}, citeulike-article-id = {3149115}, doi = {http://dx.doi.org/10.1007/s00542-008-0588-1}, issn = {0946-7076}, journal = {Microsystem Technologies}, month = {October}, number = {9-11}, pages = {1215--1216}, posted-at = {2008-08-22 14:05:49}, publisher = {Springer}, title = {Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST07, Besancon, France, 79 June 2007}, url = {http://dx.doi.org/10.1007/s00542-008-0588-1}, volume = {14}, year = {2008} }

TY - JOUR ID - citeulike:3149115 L3 - citeulike-article-id:3149115 IS - 9-11 JF - Microsystem Technologies SN - 0946-7076 EP - 1216 TI - Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST07, Besancon, France, 79 June 2007 PB - Springer VL - 14 SP - 1215 AU - Malek, Khan AU - Chantal AU - Saile AU - Volker AU - Michel AU - Bernd PY - 2008/10// UR - http://dx.doi.org/10.1007/s00542-008-0588-1 ER -