Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films

@article{citeulike:1581912, author = {Goncharov and A. and Demchishin and A. and Kostin and E. and Michenko and V. and Stetsenko and B. and Ternovo and E. and Shchurenko and A.}, citeulike-article-id = {1581912}, doi = {http://dx.doi.org/10.1134/S106378420708018X}, issn = {1063-7842}, journal = {Technical Physics}, month = {August}, number = {8}, pages = {1073--1078}, posted-at = {}, publisher = {MAIK Nauka Interperiodica}, title = {Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films}, url = {http://dx.doi.org/10.1134/S106378420708018X}, volume = {52}, year = {2007} }

TY - JOUR ID - citeulike:1581912 L3 - citeulike-article-id:1581912 TI - Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films JF - Technical Physics VL - 52 IS - 8 SP - 1073 EP - 1078 PB - MAIK Nauka Interperiodica SN - 1063-7842 AU - Goncharov AU - Demchishin AU - Kostin AU - Michenko AU - Stetsenko AU - Ternovo AU - Shchurenko PY - 2007/08// UR - http://dx.doi.org/10.1134/S106378420708018X ER -